Wafer Spinner - SEE DESCRIPTION (G5-213047.1)
| Agency: | ENERGY, DEPARTMENT OF |
|---|---|
| State: | Illinois |
| Type of Government: | Federal |
| FSC Category: |
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| NAICS Category: |
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| Posted Date: | Aug 8, 2025 |
| Due Date: | Aug 13, 2025 |
| Solicitation No: | 5-B193-Q-00686-00 |
| Original Source: | Please Login to View Page |
| Contact information: | Please Login to View Page |
| Bid Documents: | Please Login to View Page |
Description
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- Contract Opportunity Type: Solicitation (Original)
- Original Published Date: Aug 08, 2025 12:29 pm CDT
- Original Date Offers Due: Aug 13, 2025 12:00 pm CDT
- Inactive Policy: Manual
- Original Inactive Date: Aug 14, 2025
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Initiative:
- None
- Original Set Aside:
- Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
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NAICS Code:
- 333242 - Semiconductor Machinery Manufacturing
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Place of Performance:
Lemont , IL 60439USA
Argonne National Laboratory is seeking to source:
1qty Wafer spinner that can spin photoresist and other polymers
- splash ring
- speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round
- Bowl Cover made of safety glass
- Process bowl of polypropylene (removable)
- d- igital vacuum gauge
- vacuum monitoring
- cover open interlock
- 115VAC 60/50hz 5/3 single phase
- Acceleration 4000 rpm/sec
- spinning time 1s-999s
- 200 recipes with 40 steps each
- waste bottle (0.5l in front of spinner)
- Exhaust connection PG11 tube
- Dimension: (wxdxh) cannot exceed (350x446x430mm)
- directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line
- spin chucks for : 150mm, 100mm, 3", 2" - with centering rings
- piece chuck with 3mm diameter vacuum area
- spare bowl
- spare waste bottle
- options for future dispense and edge bead upgrades
Please see attached solicitation package - on the ANL-70 form: Please remember to complete points A-F on page 3.
NO SOLICITATION WILL BE CONSIDERED WITHOUT ALL THESE COMPLETED. If any components are missing, your solicitation will be discarded.
All forms and signed solicitation have a requested completion date of 8/13/25 at 12PM CST. If there are any questions please feel free to reach out to awegrzyn@anl.gov.
- 9700 S. Cass Ave
- Lemont , IL 60439
- USA
- Annette Wegrzyn
- awegrzyn@anl.gov
- Phone Number 6302522794
- Aug 08, 2025 12:29 pm CDTSolicitation (Original)
See Also
Bid Title: Annual Purchase of Liquid Alum Category: RFQ/RFP Status: Open Description: Seeking
Woodstock city
Due by 11/13/2026
Bid Solicitation # 27-493ISP-ADMIN-B-54559 Bid Solicitation # 27-493ISP-ADMIN-B-54559 Organization Name ISP - Illinois
State Government of Illinois
Due by 11/12/2026
Bid Solicitation # 27-493ISP-ADMIN-B-54752 Bid Solicitation # 27-493ISP-ADMIN-B-54752 Organization Name ISP - Illinois
State Government of Illinois
Due by 11/24/2026
Follow Inductively Coupled Plasma - Optical Emission Spectrometry Active Contract Opportunity Notice ID
DEPT OF DEFENSE
Due by 11/15/2026