Wafer Spinner - SEE DESCRIPTION (G5-213047.1)
| Agency: | ENERGY, DEPARTMENT OF |
|---|---|
| State: | Illinois |
| Type of Government: | Federal |
| FSC Category: |
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| NAICS Category: |
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| Posted Date: | Aug 8, 2025 |
| Due Date: | Aug 13, 2025 |
| Solicitation No: | 5-B193-Q-00686-00 |
| Original Source: | Please Login to View Page |
| Contact information: | Please Login to View Page |
| Bid Documents: | Please Login to View Page |
Description
APEX Accelerators are an official government contracting resource for small businesses. Find your local APEX Accelerator (opens in new window) for free government expertise related to contract opportunities.
APEX Accelerators are funded in part through a cooperative agreement with the Department of Defense.
The APEX Accelerators program was formerly known as the Procurement Technical Assistance Program (opens in new window) (PTAP).
- Contract Opportunity Type: Solicitation (Original)
- Original Published Date: Aug 08, 2025 12:29 pm CDT
- Original Date Offers Due: Aug 13, 2025 12:00 pm CDT
- Inactive Policy: Manual
- Original Inactive Date: Aug 14, 2025
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Initiative:
- None
- Original Set Aside:
- Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
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NAICS Code:
- 333242 - Semiconductor Machinery Manufacturing
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Place of Performance:
Lemont , IL 60439USA
Argonne National Laboratory is seeking to source:
1qty Wafer spinner that can spin photoresist and other polymers
- splash ring
- speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round
- Bowl Cover made of safety glass
- Process bowl of polypropylene (removable)
- d- igital vacuum gauge
- vacuum monitoring
- cover open interlock
- 115VAC 60/50hz 5/3 single phase
- Acceleration 4000 rpm/sec
- spinning time 1s-999s
- 200 recipes with 40 steps each
- waste bottle (0.5l in front of spinner)
- Exhaust connection PG11 tube
- Dimension: (wxdxh) cannot exceed (350x446x430mm)
- directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line
- spin chucks for : 150mm, 100mm, 3", 2" - with centering rings
- piece chuck with 3mm diameter vacuum area
- spare bowl
- spare waste bottle
- options for future dispense and edge bead upgrades
Please see attached solicitation package - on the ANL-70 form: Please remember to complete points A-F on page 3.
NO SOLICITATION WILL BE CONSIDERED WITHOUT ALL THESE COMPLETED. If any components are missing, your solicitation will be discarded.
All forms and signed solicitation have a requested completion date of 8/13/25 at 12PM CST. If there are any questions please feel free to reach out to awegrzyn@anl.gov.
- 9700 S. Cass Ave
- Lemont , IL 60439
- USA
- Annette Wegrzyn
- awegrzyn@anl.gov
- Phone Number 6302522794
- Aug 08, 2025 12:29 pm CDTSolicitation (Original)
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