Ultra-High Vacuum (UHV) System

The University of Calgary (UCalgary) intends to purchase from Angstrom Engineering an integrated, multi-module ultra-high vacuum (UHV) thin-film deposition and processing cluster platform, including delivery, installation, and commissioning. UCalgary’s qLab requires shadow evaporation to fabricate sub-nanometer Josephson junctions with high film uniformity on a static, tilted 150 mm substrate. Angstrom’s system incorporates proprietary Aeres® software, an integrated “Swing-Away” Quartz Crystal Microbalance (QCM), and a predictive Rate-vs-Power algorithm. The system’s specialized hardware and proprietary control automation are required to meet qLab’s mandatory technical requirements and cleanroom operating constraints. In addition, Angstrom Engineering holds the exclusive patent for a programmable flux-blocking barrier capable of achieving film non-uniformity of less than ±3.0% under the required operating conditions. This patented technology is essential to satisfy qLab’s mandatory performance requirements.