Rebid of Purchase of a Maskless Lithography System

Agency:	State Government of Louisiana
State:	Louisiana
Type of Government:	State & Local
NAICS Category:	334516 - Analytical Laboratory Instrument Manufacturing
Posted Date:	Mar 18, 2026
Due Date:	Apr 13, 2026
Solicitation No:	50012-625-26A
Original Source:	Please Login to View Page
Contact information:	Please Login to View Page
Bid Documents:	Please Login to View Page

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INVITATION TO BID

DO NOT SHIP BASED UPON THIS BID

Bid Number: 50012-625-26A

Bid Title:

Rebid of Purchase of a Maskless Lithography System

Return this SIGNED form to:

Louisiana Tech University

Oﬃce of Purchasing

PO Box 3157

208 Keeny Circle, RM 408

Ruston, Louisiana 71272

Bid Schedule:

Pre-Bid Conference:

N/A

Bid Submission Deadline / Opening:

April 13, 2026 @ 2:00 PM

Bidder agrees to comply with all

conditions below and attached to this

request.

Prices are to be complete and the

FOB point is to be Louisiana Tech

University unless otherwise speciﬁed.

Bidder Information: (Bidder to provide all required information)

(Full Company Name)

(Full Street or Mailing Address)

(City)

(State)

(Zip)

(Phone)

(Email)

(Fax)

(Company Quote Number if Applicable)

PRICES MUST BE FIRM FOR AT LEAST 30 DAYS FROM BID OPENING DATE

FAILURE TO SIGN BELOW IN INK SHALL DISQUALIFY BID

Typed or Printed Name / Title

Authorized Signature

The Louisiana Tech University Oﬃce of Purchasing is seeking SEALED BIDS for the following:

Rebid of Purchase of a Maskless Lithography System

*No Bid Bond is required for this solicitation*

**See Attached Bid Speciﬁcations for additional details**

ALL BIDS MUST BE RETURNED TO THE LOUISIANA TECH UNIVERSITY OFFICE OF PURCHASING VIA MAIL OR IN PERSON.

The Bidder is solely responsible for ensuring that its courier service provider makes inside deliveries to our physical location. Louisiana Tech

University is not responsible for any delays caused by the bidder’s chosen means of delivery.

For questions regarding speciﬁcations, please contact the Oﬃce of Purchasing at 318-257-4205 or purchasing@latech.edu. Please ensure that

the above bid number appears on all communications.

IMPORTANT: If bidding other than requested brand and product number (or style), enclose suﬃcient literature to determine compliance with speciﬁcations. Failure to comply with this

request may eliminate your bid from consideration. Any manufacturer’s names, trade names, brand names, or catalog numbers used in the speciﬁcations are for the purpose of describing

and establishing general quality levels. Such references are not intended to be restrictive. Bids will be considered for any brand which meets or exceeds the quality of the speciﬁcations

listed for any items.

PUR2526028 Rev. 06/12/2025

The Louisiana Tech University Oﬃce of Purchasing is now accepting SEALED BIDS for the Rebid of Purchase of a Maskless Lithography

System for the Institute of Micromanufacturing. The following speciﬁcations have been established by the faculty and technical staﬀ

of the University. Bidders must provide product literature for their bid item and any bid accessories. Failure to provide product

documentation and / or manufacturer’s speciﬁcations shall result in the vendor’s bid being deemed as non-responsive.

Bidder should pay careful attention to Item #5 on the Instructions to Bidders regarding pre-payments.

Technical Speciﬁcations:

• The system must have a minimum feature size of less than 1 µm.

• The system must have a maximum sample size of at least 5” x 5”, with a total height of 0.25”.

• The system must be able to write to wafer pieces or chips with a size of at least 2 cm x 2 cm.

• The system must have a write area of at least 100 mm x 100 mm.

• The system must be able to pattern a 100 mm x 100 mm square in 16 hours at a speciﬁed sub-micron imaging size.

• The system must be able to pattern standard g, h, and i-band photoresists. We commonly use AZ1500, S1813, SU3010,

SU3035, SU5, and SU8, with thickness of 2 µm to 50 µm, and the system should be able to pattern under such

conditions.

• The system must accept multiple standard CAD and lithography formats, which may include but are not limited to:

GDS2, DXF, or CIF.

• System must protect users from UV light and wafers from external light exposure.

• Standard operation of the system must be achievable by a single user.

Software Requirements:

The software shall display the system status. Recipe programming will be provided for all major process parameters. The

software must include full data logging capability of user-selectable run-time process parameters, allowing off-line veriﬁcation

and analysis of process conditions. The operating system must be integrated into the system, i.e., an external computer running

MATLAB or similar software will not be allowed.

Other Requirements/Conditions:

• The system must come with a minimum of a one (1) year warranty

• Vendor shall have available parts and repair personnel within the United States.

• The system must include all manuals and the manufacturer offers telephone, e-mail, and remote system support during

the normal work hours of our University.

Shipping, Installation, and Training:

• Price shall include shipping, transportation, and insurance from the vendor's production facility to the receiving dock

at the Institute for Micromanufacturing, 911 Hergot Ave, Ruston, LA 71270. Also known as Free On Board or F.O.B.

shipping.

• The Vendor is responsible for all costs and administrative processes involved in the importation / customs clearance of

any item(s) entering the United States

• The shipping crate must have chock and tilt registration devices. Prior to unloading, the University will check the devices

and contact supplier in case any of these are activated and will request guidance. The same will apply if the crate is

showing damage.

• Unloading the equipment is the responsibility of the University.

• The University is responsible for placing the system and installing any supporting facilities.

• The Vendor is responsible for starting up the equipment and verifying the operation.

PUR2526028 Rev. 06/12/2025

Taxes:

• Louisiana Tech University is sales tax exempt, bids shall not include tax.

Vendors shall complete all pages of this Invitation to Bid, including the printed name and signature of the person

submitting the quotation and pricing on the Schedule of Items page. Bid received without this information shall be

deemed as non-responsive. Vendors are encouraged to include their own quote for an explanation of your proposed

system, BUT this vendor quote shall not be a substitute for this completed Invitation to Bid Form.

PUR2526028 Rev. 06/12/2025

Schedule of Items

page 4

Bid Number: 50012-625-26A

Bid Title: Rebid of Purchase of a Maskless Lithography System

IMPORTANT: If bidding other than requested brand and product number (or style), enclose suﬃcient literature to determine compliance with speciﬁcations. Failure to comply with this request

may eliminate your bid from consideration. Any manufacturer’s names, trade names, brand names, or catalog numbers used in the speciﬁcations are for the purpose of describing and

establishing general quality levels. Such references are not intended to be restrictive. Bids will be considered for any brand which meets or exceeds the quality of the speciﬁcations listed for

any items.

Item Description

Maskless Lithography System

Quantity Unit Price Total Price

*see attached bid speciﬁcations*

**failure to provide product literature and /or manufacturer's speciﬁcations with the bid; will cause bid to be

deemed as non-responsive**

1 each

PUR2526028 Rev. 06/12/2025

Louisiana Tech University

Division of Finance

Office of Purchasing

THIS IS A REQUEST FOR A SEALED BID

INSTRUCTIONS TO BIDDERS

1. Read the entire bid, including all terms and conditions and specifications.

2. Louisiana Tech University is not liable for any cost incurred by the bidders prior to execution of a contract and the

issuance of a purchase order. Any bidder who ships or otherwise expends time or money prior to award as defined

does so at the bidder’s own risk.

3. All bid prices must be typed or written in ink. Any corrections, erasures or other forms of alteration to unit prices

should be initialed by the bidder. If the bidder needs to submit a change, question, exception, or modification to any

aspect of the bid specifications, terms, conditions, or bidder instructions, must do so in written form submitted to the

Louisiana Tech University Office of Purchasing prior to the bid opening date. All responses and/or addenda will be

officially submitted by the Louisiana Tech University Office of Purchasing 72 (seventy-two) business hours before

the bid opening date. Business hours is defined as University operating hours while the University is open. Unless

received as specified above, all bid information will remain unchanged.

4. This bid is to be manually signed in ink.

5. Bid prices shall include all delivery charges paid by the vendor, F.O.B. Destination, unless otherwise provided in the

solicitation. Bids requiring deposits, “payment in advance” or “C.O.D” may be rejected. Bid prices shall also include

all customs clearance, duties, and taxes into the United States; if applicable. This is to include, but is not limited to,

customs broker fees, document fees, duties, taxes, etc. The University does not retain, nor will it retain a customs

broker. All importation shall be the responsibility and at the cost of the Vendor. Payment is to be made within 30

days after receipt of properly executed invoice or delivery, whichever is later.

6. Amount of bid bond required: every bid submitted for in excess of fifty thousand dollars shall be accompanied by a

bid bond guaranteed by a surety company qualified to do business in the state of Louisiana. The bid bond shall be

for five percent of the official bid amount.

7. To assure consideration of your bid, all bids and addenda should be returned in an envelope or package clearly

marked with the bid opening date and the bid number; or submitted in the special envelope, if furnished for that

purpose. The Bidder is solely responsible for ensuring that its courier service provider makes inside deliveries to

our physical location. The University is not responsible for any delays caused by the bidder’s chosen means of

delivery. Bidder is solely responsible for the timely delivery of its bid. Bids received after the due date and time will

not be considered.

8. Bids submitted are subject to provisions of the laws of the State of Louisiana including but not limited to L.R.S.

39:1551-1736; Purchasing rules and regulations; executive orders; standard terms and conditions; special

conditions; and specifications listed in this solicitation.

9. Important: By signing the bid, the bidder certifies compliance with all instructions to bidders, terms conditions and

specifications, and further certifies that this bid is made without collusion or fraud. This bid is to be manually signed

in ink by a person authorized to bind the vendor (see no. 27). All bid information shall be in ink or typewritten.

10. Address all inquiries and correspondence to the Louisiana Tech University Office of Purchasing at the address and

telephone number listed herein.

PUR2526028 Rev. 06/12/2025

This page summarizes the opportunity, including an overview and a preview of the attached documents.

Bid Number	Description	Date Issued	Bid Open Date/Time
50012-625-26A	Rebid of Purchase of a Maskless Lithography System Original: 50012-625-26A	03/18/2026	04/13/2026 2:00:00 PM CT

Department	++ University - Louisiana Tech University
Section	Purchasing Department
Dept Code	50012
Contact	Melissa Hughes
Address	P.O. Box 3157 408 Keeny Hall Ruston, LA 71272
Phone	318-257-4205
Fax	318-257-3772
Email	mhughes@latech.edu

Rebid of Purchase of a Maskless Lithography System

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