Prototype Silicon Membrane Grating Devices Fabrication

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Contract Opportunity

SLAC National Accelerator Laboratory is operated by Stanford University for the Department of Energy. As a management and operating contractor, subcontracts awarded by the Laboratory are not Federal procurements, and are not directly subject to the Federal Acquisition Regulations in 48 CFR. Nonetheless, certain Federal laws, Executive Orders, and regulations may affect our DOE approved purchasing system, as required by statute, regulation, or contract terms and conditions.

SLAC has a requirement for a U.S. domestic end item source of the following:

Description of technical requirements:

Frame Type: Low-Res Single Crystal Silicon

Frame Dimensions: 7.5mm x 4.5mm (±0.2mm) or similar

Frame Thickness: 200μm (±10μm) or 300μm (±10μm) thick (200μm preferred)

Membrane Type: Single Crystal Silicon

Membrane Dimensions: 0.05mm x 0.05mm (±0.01mm)

Membrane Array: 2 x 2 square, 0.1mm center-to-center pitch, centered to the frame.

Membrane Thickness: 90nm (±5nm)

Window Dimensions: Approximately 0.25mm x 0.25mm. Comprised of silicon oxynitride surrounding, above and below the membrane to keep it flat, approximately centered to the membrane.

Grating Pattern: Array of slots partially through the Silicon membrane with a nominal depth of 45nm, covering the central 35μm x 35μm area of the membrane. The grating critical dimensions will be 1.5μm (±0.3μm). Final designs will follow design files provided by SLAC and be confirmed at project kickoff. Sidewalls may not be perfectly vertical, and roughness will not be known until time of delivery. 3 of 4 membranes will be patterned with gratings on each chip, and one membrane will be plain, unpatterned.

Quantity Delivered

Prototype Silicon Membrane Grating Devices

Fabrication, Quality Control and Packaging

Quantity: 10-20 Units

The award will be made based upon Lowest Price Technically Acceptable method.

Marking of Proprietary/Confidential Information. Offerors shall properly mark and identify with a restrictive legend or information markings on pages of the proposal that contain Proprietary/confidential information.

For Offeror to be eligible for a subcontract award with the University and the U.S. Department of Energy (DOE), Offeror shall be registered with the System for Award Management (SAM). Entities may register at no cost directly at the SAM website: https://www.sam.gov.

The resulting purchase order shall be performed in accordance with SLAC National Accelerator Laboratory's Terms and Conditions for Fixed Price Commercial Supplies and Services dated August 2023.

NOTE: The following documents are attached in this solicitation.

1. Buy American Act Certificate


2. Terms & Conditions for Fixed Price Commercial Supplies and Services, August 2023

Please provide quoted price, delivery, technical compliance statement and certification to the attention of Marlene Curiel.

Payment Terms: Net 30 days

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