Notice of Intent to Sole Source – Deep Reactive Ion Etch (ICP-DRIE) Tool

Agency: DEPT OF DEFENSE
State: Federal
Type of Government: Federal
FSC Category:
  • 36 - Special Industry Machinery
NAICS Category:
  • 333242 - Semiconductor Machinery Manufacturing
Set Aside: No Set aside used
Posted Date: Jun 24, 2025
Due Date: Jul 8, 2025
Solicitation No: N00173-25-SSN-TJ01
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Contact information: Please Login to View Page
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Description

Follow
Notice of Intent to Sole Source – Deep Reactive Ion Etch (ICP-DRIE) Tool
Active
Contract Opportunity
Notice ID
N00173-25-SSN-TJ01
Related Notice
Department/Ind. Agency
DEPT OF DEFENSE
Sub-tier
DEPT OF THE NAVY
Major Command
ONR
Sub Command
ONR NRL
Office
NAVAL RESEARCH LABORATORY
General Information
  • Contract Opportunity Type: Special Notice (Original)
  • Original Published Date: Jun 24, 2025 01:48 pm EDT
  • Original Response Date: Jul 08, 2025 04:00 pm EDT
  • Inactive Policy: 15 days after response date
  • Original Inactive Date: Jul 23, 2025
  • Initiative:
    • None
Classification
  • Original Set Aside: No Set aside used
  • Product Service Code: 3670 - SPECIALIZED SEMICONDUCTOR, MICROCIRCUIT, AND PRINTED CIRCUIT BOARD MANUFACTURING MACHINERY
  • NAICS Code:
    • 333242 - Semiconductor Machinery Manufacturing
  • Place of Performance:
    USA
Description

This Notice of Intent is not a request for competitive proposals. This is not a solicitation or request for offers. No solicitation package is available and telephone requests will not be honored. Only one responsible source and no other supplies or services will satisfy agency requirements.



The U.S. Department of Navy, Naval Research Laboratory (NRL) Contracting Division intends to enter into a sole source firm fixed price contract with Oxford Instruments America, Inc. in accordance with FAR 13.501(a) and 41 USC 1901 for the procurement of an Inductively Coupled Plasma - Deep Reactive Ion Etch (ICP - DRIE) tool using fluorine chemistries optimized for Bosch etch from Oxford Instruments. This tool was deemed available from the original source, Oxford Instruments.



This notice is being posted to meet the requirements of FAR Subpart 5.2 and DFARS 206.302-1. A solicitation will not be posted; however, any firm that believes it can meet this requirement may give written notification to the Contract Specialist within 15 days of publication of this announcement. Supporting evidence must be in sufficient detail to demonstrate the ability to provide comparable items and developmental experience. All responsible sources may submit a capability statement, proposal, or quotation, which shall be considered. However, a determination by the Government to compete the proposed procurement based on the responses to this notice is solely within the discretion of the Government.


Attachments/Links
Contact Information
Contracting Office Address
  • 4555 OVERLOOK AVE SW
  • WASHINGTON , DC 20375-5328
  • USA
Primary Point of Contact
Secondary Point of Contact


History
  • Jun 24, 2025 01:48 pm EDTSpecial Notice (Original)
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