NOTICE OF INTENT TO SOLE SOURCE: High-Speed, Distributable Monte Carlo Simulation for SEM-based Overlay Metrology

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Contract Opportunity

The United States Department of Commerce (DOC), National Institute of Standards and Technology (NIST), Acquisition Management Division (AMD) intends to negotiate, on a sole source basis, with AMAG Consulting, LLC, 221 FEATHERWOOD COURT, SCHENECTADY, NY 12303 for the purchase of High-Speed, Distributable Monte Carlo Simulation for SEM-based Overlay Metrology to be utilized by NIST’s Microsystems and Nanotechnology Division (MND). The statutory authority for this acquisition is 41 USC 3304(a)(1); FAR 13.106-1(b).

***** Sole source determination is based on the need to acquire High-Speed, Distributable Monte Carlo Simulation for SEM-based Overlay Metrology to advance the CHIPS mission of developing imaging and measurement solutions for integrated circuit (IC) overlay metrology using a scanning electron microscope (SEM).

Minimum Requirements:

Description: Monte Carlo software (MC SW)

Quantity: 1

Specifically, the Contractor shall provide an MC SW with the following minimum requirements:

1. Sophisticated, 3D sample geometry, material definition, and visualization by graphical user interface

2. Many shape primitives spheres, cylinders, cones, frustum, and surface roughness for easy simulation scene definition

3. Current state-of-the-art secondary electron generation physics models implemented

4. Create a database of material physical models for materials used in IC production, e.g., Si, SiO2, Si3N4, etc.

5. Structures, such as overly, dense and isolated IC lines, and contact holes, as predefined structures, made available and ready to be used

6. 3D representation of the simulated/modeled results

7. Batch processing capability

8. Capability to run on CPU clusters and efficiently gather and visualize simulated results by a CPU cluster

Market Research was conducted in October and November of 2024, including internet searches, searches of GSA and Thomas Register, speaking with professional contacts, and reviewing company websites. Internet searches using google.com revealed several companies that have SEM simulation software, however they do not run on CPU clusters, do not have 3D visualization, do not include primatives for IC structures, or are not designed for electrons. AMAG Consulting is the only company that can provide the required software. This market research determined that AMAG Consulting is the sole manufacturer and distributor of the software that meets the required minimum specifications.

*****The North American Industry Classification System (NAICS) code for this acquisition is 513210 – Software Publishers, with a small business size standard of $47 million.

*****A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will be considered solely for the purpose of determining whether to conduct a competitive procurement.

*****No solicitation package will be issued. This notice of intent is not a request for quotations; however, all responsible sources interested may identify their interest and capability to respond to this requirement. Interested parties that believe they can satisfy the requirements listed above must identify their capability in writing before the response date of this notice. Only responses received by 3:00 PM Eastern Standard Time on March 14, 2025 will be considered by the government. Responses shall be submitted via email to both the Contract Specialist jenna.bortner@nist.gov and Contracting Officer forest.crumpler@nist.gov. Responses that do not include the Contracting Officer will not be considered.

Contracting Office Address:

100 Bureau Drive

Bldg. 301, Mail Stop 1640

Gaithersburg, Maryland 20899-0001

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