Notice of Intent to Sole Source: Scanning Threshold Particle Counter

Announcement Type: Special Notice

Classification Code: 6695

Announcement Number: NB305000-25-00535 (NOI)

Subject: Notice of Intent to Noncompetitively Acquire Advanced Chemical Metrology for Semiconductor Cleaning Chemicals: Organic Contaminants, Native Particles and Precursors, and Rapid Particle and Impurity Characterization

Semiconductor manufacturing yield enhancement requires ongoing risk analysis of cleaning chemical purity wherein critical contaminants are already at levels difficult or impossible to detect, let alone identify and quantify. Next-generation chips will require even purer materials and advanced metrological capabilities for the detection, identification, and quantification of impurities in semiconductor cleaning chemicals, necessitating a practical roadmap for assessing material purity commensurate with the needs of the next generation in semiconductor manufacturing.

One exemplary system of study is ultra-pure water (UPW) as semiconductor fabrication plants (fabs) can utilize upwards of 3.4 × 107 L d-1 (9 × 106 gal d-1 or ≈ 14 Olympic-size swimming pools) of UPW, and it is used in all wet-processing steps where, to a large extent, the cleanliness, and hence yield, of a wafer is determined by the purity of the water. Further, the International Roadmap for Devices and Systems (IRDS) has identified that a “Lack of proven particle metrology limits the ability to confirm whether UF (ultrafiltration of UPW) is effective in controlling killer size particles down to the critical particle size”.

Aerosol-based testing of UF will require nebulizing and drying a UPW stream to form an aerosol and simultaneously measuring the upstream and downstream particle size distributions and number densities. This aerosolization process directly mimics what occurs on-wafer. These aerosol-based methods are quickly gaining acceptance and NIST research would speed these efforts.

The IRDS roadmap has identified that the size of killer particles for the next generation of semiconductors is approaching 3 nm. At these sizes, both native particles (particles that exist in the fluid at or close to the final size and shape if the fluid were removed) and particle precursors (dissolved contaminants that can form killer particles on the wafer when the solvent is removed) must be considered. To this end, SEMI has already developed standards to address both native particles and particle precursors, e.g., SEMI C79 (Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems), SEMI C93 (Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System), and SEMI F121 (Guide for Evaluating Metrology for Particle Precursors in Water).

This notice is not a request for a quotation. A solicitation document will not be issued, and quotations will not be requested.

This acquisition is being conducted under the authority of FAR 13.106-1(b) via FAR 13.106-1(b). The North American Industry Classification System (NAICS) code for this acquisition is 334516, Analytical Laboratory Instrument Manufacturing.

The National Institute of Standards and Technology (NIST), Chemical Sciences Division requires a scanning threshold particle counter - 3 (STPC) with the following requirements: 1) a turnkey system that has been benchmarked to the above mentioned standards; 2) an all-in-one system with particle generation and detection integrated into a single unit, this will minimize diffusion losses and enable portability, 3) material-independent particle detection segregated into a minimum of three size channels (≥ 3 nm, ≥ 9 nm, and ≥ 15 nm), 4) capable of segregating contributions from native particles and particle precursors and 5) capable of operating in dilute isopropyl alcohol, hydrogen peroxide, ammonia, and hydrochloric acid. The Kanomax FMT STPC represents such a system and is the only system that meet NIST’s requirements.

1. Technical Specifications: Only Kanomax FMT provides a system that meets NIST’s requirements, including the size and weight requirements for portability to be able to test UPW systems in laboratory spaces across the NIST Gaithersburg campus. Other companies make condensation particle counters; however, they are solely designed as particle counters , not an all-in-one system (which could lead to diffusion loss and would be non-portable), and the other systems are not configured to scan particle sizes to segregate contributions from native particles and precursors. For comparable operations, these condensation particle counters require a nanoparticle generator, electrostatic classifier, and differential mobility analyzer. Additionally, other companies make particle counters for sizing native particles in liquids, but the minimum detectable size is typically ≥ 20 nm, and they are unable to detect particle precursors. The Kanomax FMT STPC is the only system on the market that has been specified as being capable of working with non-water samples such as dilute isopropyl alcohol, hydrogen peroxide, ammonia, and hydrochloric acid. Additionally, the Kanomax SPTC can detect particle precursors and native particles in liquid media. It is an all-in-one system containing both the aerosol generator and the scanning condensation particle counter.

Kanomax FMT is the sole manufacturer of the STPC, and it does not have any product distributors in the Americas.

NIST conducted market research from October 2024 – November 2024 by internet searches, discussions with sources, and a sources sought posting. Sources sought NIST-SS25-CHIPS-0012 was posted from October 31, 2024, to November 14, 2024, with no responses. The results of that market research revealed that only Kanomax FMT, 4104 Hoffman RD, White Bear Lake, MN, 55110-3708, UEI: GK5MD6JULTB4 appears to be capable of meeting NIST’s requirements.

However, any sources that believe they are capable of meeting NIST’s minimum requirements are encouraged to respond to this notice by the response date to provide the following information at a minimum: Company Unique Entity Identifier number in https://sam.gov; details about what your company is capable of providing that meets or exceeds NIST’s minimum requirements; whether your company is an authorized reseller of the product or service being cited and evidence of such authorization; and any other information that can help NIST determine whether this requirement may be competitively satisfied.