5kW Microwave Plasma CVD System

The purpose of this purchase is to satisfy the needs of the Autonomous Discovery LDRD PRJ1012745 and get a CVD reactor (full assembly or kit version) for the synthesis of single crystal boron doped diamond (BDD) fully forward compatible with the autonomous operation vision of the project:

• Microwave (2.45 GHz) Driven Chemical Vapor Deposition reactor or kit assembly with at least 2.5 kW of power, 5 kW is ideal.


• Present a large loading port to allow for, at a minimum, loading of 1 inch substrate holders, ideally this number should be two inch. Overall, something like a ICF152 is ideal to allow for easy loading and unloading of a 2” Mo puck substrate holder.


• Vacuum gate valve on the main ICF152 loading port.


• Have the ability to automatically tune the microwave power delivery, while being integrated with a circulation, dummy load, and waveguide assembly.


• Present multiple ICF70 viewports (at least 8) for future in-situ characterization. At least four of those should be placed at an angle for future in-situ ellipsometry integration.


• Present MFC configuration to allow for synthesis of BDD: four MFCs configured for H2, CH4, O2, and a flexible final H2 MFC for the boron precursor.


• Pressure controller with associated gauges


• PLD controller and process software with associated control computer and electronics. Overall, fully automated recipe/computer driven operation is critical.

Please provide the following no later than noon CDT on Friday, July 25, 2025:

1. Appendix “A” Argonne Terms and Conditions for Commercial Items and Services, ANL-71-COM, dated 2/13/2023 (REVIEW AND ACCEPT)


2. Proposal with details supporting the technical capability and adherance to the provided specifications (please remove pricing from this proposal)


3. Lead Time


4. Country of Origin (must be more than 65% USA-manufactured to be considered "Made in USA"


5. Ship from Address


6. Completed and signed ANL-70 Request for Quotation


7. Completed and signed ANL-70B Reps and Certs

Please send any questions to the Contracting Officer. Thank you in advance for your submission.