Inductively Coupled Etching System

Agency: ENERGY, DEPARTMENT OF
State: Illinois
Type of Government: Federal
FSC Category:
  • 66 - Instruments and Laboratory Equipment
NAICS Category:
  • 333242 - Semiconductor Machinery Manufacturing
Posted Date: May 15, 2026
Due Date: May 26, 2026
Solicitation No: 6-S176-Q-00231-00
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Inductively Coupled Etching System
Active
Contract Opportunity
Notice ID
6-S176-Q-00231-00
Related Notice
Department/Ind. Agency
ENERGY, DEPARTMENT OF
Sub-tier
ENERGY, DEPARTMENT OF
Office
ARGONNE NATL LAB - DOE CONTRACTOR
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General Information View Changes
  • Contract Opportunity Type: Solicitation (Updated)
  • Updated Published Date: May 15, 2026 11:41 am CDT
  • Original Published Date: May 15, 2026 11:38 am CDT
  • Updated Date Offers Due: May 26, 2026 05:00 pm CDT
  • Original Date Offers Due: May 26, 2026 05:00 pm CDT
  • Inactive Policy: Manual
  • Updated Inactive Date: May 26, 2026
  • Original Inactive Date: May 26, 2026
  • Initiative:
    • None
Classification
  • Original Set Aside:
  • Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
  • NAICS Code:
    • 333242 - Semiconductor Machinery Manufacturing
  • Place of Performance:
    IL 60439
    USA
Description

Argonne National Laboratory is seeking quotations for an Inductively Coupled Etching System in accordance with the Statement of Work titled “Q-NEXT Inductively Coupled Etching System,” dated April 27, 2026.



Award will be made on a Lowest Price, Technically Acceptable (LPTA) basis. Vendors must provide sufficient documentation to demonstrate that their proposed system meets all technical requirements of the Statement of Work.



Please submit:




  • A completed ANL-70 Request for Quotation with pricing and supporting technical evidence

  • A completed ANL-70B Representations and Certificiations



Responses are due no later than 5:00 p.m. CDT on May 26, 2026.


Attachments/Links
Contact Information
Contracting Office Address
  • 9700 S. Cass Ave
  • Lemont , IL 60439
  • USA
Primary Point of Contact
Secondary Point of Contact


History
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