GAS ANALYZER

This Notice of Intent is not a request for competitive proposals. This is not a solicitation or request for offers. No solicitation package is available and email requests will not be honored. Only one responsible source and no other supplies or services will satisfy agency requirements. The Naval Research Laboratory (NRL) intends to award a sole source purchase order to:

MKS Instruments, Inc. 2 Tech Drive, Suite 201 Andover, MA 01810

To furnish:

MICROVISION 2 QUADRUPOLE RESIDUAL GAS ANALYZER MV2 200SCEM TRIPLE UHV TH FILS

MV2 200SCEM TRIPLE X-BEAM TH FIL

Items required are 100mm diameter semi-insulating 4H Silicon Carbide wafers with CMP polish. Currently, no 100mm wafers are in production as the industry has moved to 150mm which will not work for this experiment. Micro Reclaim Technologies is the only US based commercial CMP polisher for device-grade SiC. This source is also unique as they will reclaim and polish wafers from separate orginal substrate vendors (not currently manufactured) but which have been CMP polished in exactly the same way to enable needed experiments for this DARPA program.

The North American Industry Classification System Code (NAICS) for this requirement is 334516 with the size standard of 1000. The Federal Supply Code (FSC) / Product Service Code (PSC) procurement is 6630.

This purchase will be made utilizing Simplified Acquisition Procedures in accordance with:

Federal Acquisition Regulation (FAR) Part 13.106-1(b) for purchases not exceeding the simplified acquisition threshold of $250,000.

Interested parties may identify their interests and capability to respond to this requirement in accordance with the posted opening and closing dates. Any response to this notice must show clear and convincing evidence that competition would be advantageous to the Government. Information received will be considered solely for the purpose of determining whether or not to conduct a competitive procurement. A determination by the Government not to compete this proposed purchase order based upon response to this notice is solely within the discretion of the Government. No reimbursement for any cost connected with providing capability

information will be provided.

Please reference this notice of Intent number, N0017325-1301180851 and in on your correspondence the “Subject” line of your email.