Atomic Layer Deposition (ALD) Reactor System

Agency: DEPT OF DEFENSE
State: District of Columbia
Type of Government: Federal
FSC Category:
  • 66 - Instruments and Laboratory Equipment
NAICS Category:
  • 334513 - Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables
Set Aside: Total Small Business Set-Aside (FAR 19.5)
Posted Date: Sep 1, 2026
Due Date: Sep 14, 2026
Solicitation No: N00173-26-Q-TB02
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Description

Follow
Atomic Layer Deposition (ALD) Reactor System
Active
Contract Opportunity
Notice ID
N00173-26-Q-TB02
Related Notice
N00173-26-SSN-TB01
Department/Ind. Agency
DEPT OF DEFENSE
Sub-tier
DEPT OF THE NAVY
Major Command
ONR
Sub Command
ONR NRL
Office
NAVAL RESEARCH LABORATORY
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General Information
  • Contract Opportunity Type: Combined Synopsis/Solicitation (Original)
  • Original Published Date: Sep 01, 2026 04:13 pm EDT
  • Original Date Offers Due: Sep 14, 2026 05:00 pm EDT
  • Inactive Policy: 15 days after date offers due
  • Original Inactive Date: Sep 29, 2026
  • Initiative:
    • None
Classification
  • Original Set Aside: Total Small Business Set-Aside (FAR 19.5)
  • Product Service Code: 6640 - LABORATORY EQUIPMENT AND SUPPLIES
  • NAICS Code:
    • 334513 - Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables
  • Place of Performance:
    Washington , DC
    USA
Description

COMBINED SYNOPSIS / SOLICITATION FOR COMMERCIAL ITEMS



This is a combined synopsis/solicitation for commercial products or commercial services prepared in accordance with part 12. This announcement constitutes the only solicitation. Offers are being requested and a separate written solicitation will not be issued.



Solicitation number N00173-26-Q-TB02 is issued as a request for quotation (RFQ) for an atomic layer deposition (ALD) reactor for the uniform and conformal deposition of oxide, nitride, and metal films with atomic-layer precision onto substrates of high aspect ratio surface topographies using both traditional thermal atomic layer deposition (ALD) and plasma enhanced ALD (PE-ALD) modes.



This acquisition is set-aside for small business concerns. This solicitation incorporates provisions and clauses by reference. The full text of provisions and clauses may be accessed electronically at www.acquisition.gov.



The Defense Priorities and Allocations System (DPAS) and assigned rating are DO-C9.



See solicitation attachment, below.




Attachments/Links
Contact Information
Contracting Office Address
  • 4555 OVERLOOK AVE SW
  • WASHINGTON , DC 20375-5328
  • USA
Primary Point of Contact
Secondary Point of Contact
History
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